MEMS (Micro-Electro Mechanical Systems)

MEMS (Micro-Electro Mechanical Systems)

Abstract :

This Presentation discusses :

• What is MEMS Technology ?
• Difference between MEMS Technology and IC manufacturing Technology.
• Three general methods of fabrication of MEMS devices :
1. Surface Micromachining
2. Bulk Micromachining
3. LIGA (Combination of Lithography, Plating, Molding)

The above three fabrication processes are usually a structured sequence of three basic processes :

1. Deposition
2. Etching
3. Lithography

There are numerous applications of MEMS technology. This Presentation is totally focused on the applications of MEMS. Some of which are :

• MEMS devices are used in conjunction with “Smart dust” motes (which sense the environment) and provide information on weather, winds, humidity, pollution etc.
• They are used in military and also for the detection of biological and chemical weapons.
• There use in Automobiles reduces cost and increases reliability and efficiency.
• In medicine, they are commonly used in disposable blood pressure transducers and weighing scales, and they are also used in skin analysis to analyze the physical and chemical properties of skin surfaces.
• MEMS in Wireless.
• Features such as higher performance, reliability and economical.
• Combination of MEMS and Nanotechnology which include applications in
1. Bio-Technology
2. Communications
3. Accelerometers etc.

Prospects of MEMS and Nanotechnology are discussed. The first thing that matters most is the cost, and then matters the rest of the things.

Using MEMS and Nanotechnology, the cost of electronic things and other equipments decreases drastically, because of its very less equipment, light in

weight and way of manufacture. So these devices are expected to be more used in practice in the future.


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