MICROMACHINED ELECTRO-MECHANICAL SYSTEMS

MICROMACHINED ELECTRO-MECHANICAL SYSTEMS

ABSTRACT:

This paper presents the brief introduction of MEMS technology as well as its application area. Micromachined Electro-Mechanical Systems (MEMS), also called Microfabricated Systems (MS), have evoked great interest in the cientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, etc.

Unit processes for bulk and surface micromachining of silicon and integration of processes for fabricating silicon microsensors will be presented. Since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance.

INTRODUCTION :

So what exactly is MEMS?

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate through the utilization of micro fabrication technology or “micro technology”.

Working definition of the term MEMS:

‘A MEMS is a device made from extremely small parts (i.e. micro parts).’

This field is the study of small mechanical devices and systems. They range in size from a few microns to a few millimeters. The field is called by a wide variety of names in different parts of the world: Micro Electro Mechanical Systems, MEMS, Micromechanics, Micro System Technology, MST, Micro Machines, Micro, and is called Nano Technology by some people (Nano technology usually refers to devices ranging in size from a nanometer to a micron).
Early efforts focused upon silicon technology and resulted in a number of successful micromechanical devices, such as pressure sensors and ink-jet printer nozzles. Yet, these are, perhaps, more accurately described as devices rather than as MEMS.


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