Silicon technology for optical MEMS

Silicon technology for optical MEMS

ABSTRACT:

A system is nothing but an implementation of logic to regulate output in response to inputs. Using discrete components and IC technology we can do the designing of electronic systems. But the systems that contain large number of operations have failed to get ideality using discrete components so we are moving towards IC technology.

The enormous developments in electronic microfabrication technologies have led to very large scale integration and emergence of an era of microelectromechanical systems. The fascinating aspect of the field of MEMS and micro devices is its multidimensional nature.

As the semiconductor silicon has optimized characteristics it is one of the most important materials for the development of MEMS There and due to the progress in optical systems for telecommunications to meet the needs for increased bandwidth this paper deals Silicon technology for optical MEMS.

Through this paper we wish to introduce MEMS, different fabrication technologies in MEMS, implementing it to the optoelectronics, various optical devices used in the MEMS and the future prognosis of the MEMS technology.


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