MICROMACHINED ELECTRO-MECHANICAL SYSTEMS

MICROMACHINED ELECTRO-MECHANICAL SYSTEMS

ABSTRACT

This paper presents the brief introduction of MEMS technology as well as its application area. Micromachined Electro-Mechanical Systems (MEMS), also called Microfabricated Systems (MS), have evoked great interest in the cientific and engineering communities. This is primarily due to several substantive advantages that MEMS offer: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics, etc.
  Unit processes for bulk and surface micromachining of silicon and integration of processes for fabricating silicon microsensors will be presented. Since MEMS provide not only better functionality with smaller chip area, but also alternative transceiver architectures for improved functionality, performance.