MICRO ELECTRO MECHANICAL SYSTEMS
ABSTRACT
MEMS technology refer to fabricating and studying systems at very small scale(1 to 200m). The MEMS systems are becoming increasingly popular for their advantages in term of reduction in cost and improved accuracy. Using MEMS technology the devices previously unthinkable are being realized and the technology assumes a great promise for the future.
The essential goals of MEMS are to reduce the size, weight, power consumption and cost (through batch fabrication/ minimization of assembly and reduction in material cost) while increasingly reliability of existing microscopic devices and also to make devices never before possible at a microscopic scale.
This report reviews the micromachining technology of micromechanical. The report explores the basic process involve in fabrication of MEMS. Various method have been analyzed from an overall perspective along with the relative merits and demerits of each of the techniques. In this report various industrial as well as medical fields have been discussed which are the good platform for implanting micromachined devices. Advances in VLSI(very large scale integration) technology provides a good knowledge base for MEMS technology.
Finally a summary of all important techniques has been attempted to have an overview of microfabrication techniques of Microelectromechanical systems.
Download full seminar papers At
http://www.enjineer.com/forum
No comments:
Post a Comment