MEMS AND APPLICATIONS OF MEMS & NANOTECNOLOGY

MEMS AND APPLICATIONS OF MEMS & NANOTECNOLOGY

ABSTRACT:

MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. In this paper we have discussed some of the fabrication techniques and packaging. Some of the obstacles preventing its wider adoption are: Limited Options, Fabrication and Packaging. The MEMS and Nanotechnology Exchange provides services that can help with some of these problems. MEMS and Nanotechnology is currently used in low- or medium-volume applications and also in BIOTECHNOLOGY, COMMUNICATIONS and in ACCELEROMETERS. The nature of MEMS and Nanotechnology and its diversity of useful applications make it potentially a far more pervasive technology than even integrated circuit microchips.

INTRODUCTION:

MEMS is an abbreviation for Micro Electro Mechanical Systems. This is a rapidly emerging technology combining electrical, electronic, mechanical, optical, material, chemical, and fluids engineering disciplines. As the smallest commercially produced "machines", MEMS devices are similar to traditional sensors and actuators although much, much smaller. e.g. Complete systems are typically a few millimeters across, with individual features / devices of the order of 1-100 micrometers across.


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