MEMS

MEMS

ABSTRACT:

A new innovation in the field of nano technology is Micro-Electro-Mechanical Systems (MEMS) .This field is the study of small mechanical devices and systems. They range in size from a few microns to a few millimeters. (Nano technology usually refers to devices ranging in size from a nanometer to a micron).MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of micro sensors and micro actuators and expanding the space of possible designs and applications. It gives a brief overview of the technology and some of the methods used to create microstructures.

INTRODUCTION:

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences and the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices
MEMS technology is based on a number of tools and methodologies, which are used to form small structures with dimensions in the micrometer scale (one millionth of a meter). Significant parts of the technology has been adopted from integrated circuit (IC) technology. There are three basic building blocks in MEMS technology, which are the ability to deposit thin films of material on a substrate, to apply a patterned mask on top of the films by photolithographic imaging, and to etch the films selectively to the mask. A MEMS process is usually a structured sequence of these operations to form actual devices. Here will discuss briefly about deposition, Etching, Lithography in detail.


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